Diffraction Intensities of (002) Line of Cokes

Multiparametric scaling of diffraction intensities.

A novel and general approach to scaling diffraction intensities is presented. The method minimizes the disagreement among multiple measurements of symmetry-related reflections using a stable refinement procedure. The scale factors are described by a flexible exponential function that allows different scaling corrections to be chosen and combined according to the needs of the experiment. The sca...

Atomic resolution imaging of a carbon nanotube from diffraction intensities.

Atomic imaging of three-dimensional structures has required a crystal in diffraction or a lens in electron imaging. Whereas diffraction achieves very high resolution by averaging over many cells, imaging gives localized structural information, such as the position of a single dopant atom. However, lens aberrations limit electron imaging resolution to about 1 angstrom. Resolution is reduced furt...

Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry.

We investigate the impact of line-edge and line-width roughness (LER, LWR) on the measured diffraction intensities in angular resolved extreme ultraviolet (EUV) scatterometry for a periodic line-space structure designed for EUV lithography. LER and LWR with typical amplitudes of a few nanometers were previously neglected in the course of the profile reconstruction. The two-dimensional (2D) rigo...

X-ray lensless microscopy from undersampled diffraction intensities

Bayesian Reconstruction of Electron Energydistributions from Emission Line Intensities

Low-pressure plasmas are nowadays widely used for technical applications of plasma-surface interactions, such as plasma etching, material deposition, sputtering, etc. For a thorough understanding of individual processes in plasma processing the electron energy distribution (EED) function in the bulk plasma is of great importance. The EED determines the rates of all electron induced reactions as...